Nettet2. mai 2024 · To achieve low contact resistance between metal and III-V material, transmission-line-model (TLM) structures of molybdenum (Mo) were fabricated on indium phosphide (InP) substrate on the top of an indium gallium arsenide (InGaAs) layer grown by molecular beam epitaxy. The contact layer was prepared using a digital etch … Nettet1. jul. 2004 · An off-line image analysis algorithm detecting the line edge, and an edge roughness characterization scheme, based on scaling analysis, are briefly described. …
Line width roughness accuracy analysis during pattern
Nettet5. apr. 2024 · The effects of hull and propeller roughness are presented over ten years of operation on ship performance. The developed model used in this study is a combination of NavCad and Matlab to perform the resistance and propulsion computations of the selected ship as well as the processing of input and output data. By considering the … Nettet5. jun. 2009 · Characterization of line edge roughness and line width roughness of nano-scale typical structures Abstract: Two kinds of nano-scale typical structures were fabricated for characterizing line edge roughness (LER) and … dog name discs uk
Line edge roughness and critical dimension variation: Fractal ...
NettetDownsizing in engine size is pushing the automotive industry to operate compressors at low mass flow rate. However, the operation of turbocharger centrifugal compressor at low mass flow rate leads to fluid flow instabilities such as stall. To reduce flow instability, surface roughness is employed as a passive flow control method. This paper … Nettet18. mar. 2016 · Line edge roughness (LER) and line width roughness (LWR) are analyzed during pattern transfer in a self-aligned quadruple patterning (SAQP) process. This patterning process leads to a... Nettet1. mar. 2012 · Abstract Controlling line width roughness (LWR) is a critical issue in extreme ultraviolet lithography (EUVL). High sensitivity, high resolution, and low LWR are required for EUV lithography... dog named godiva